Purity 東ソー・エスジーエム株式会社

Tosoh SGM Corporation’s extensive product offerings and technologies have been honed over many years to meet the diverse needs of our customers. The silica glass that we manufacture is broadly divided into two types: fused silica glass and synthetic silica glass. Each of these types is further divided into detailed grades according to their purpose of use.

Fused silica glass is mainly manufactured using natural rock crystal as the raw material, whereas synthetic silica glass is mainly manufactured using silicon tetrachloride (SiCl4) as the raw material.
Fused silica glass contains no more than ppm-level impurities, and synthetic silica glass contains no more than ppb-level impurities.

The following is a sample chemical analysis of typical silica glass types:

Unit: ppm

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Type Grade Al Ca Cu Fe Na K Li Mg OH
Fused

Transparent

N

8

0.6

<0.01

0.2

0.6

0.1

0.07

0.06

200

NP

7

0.5

<0.01

0.1

0.1

0.04

0.07

0.02

200

S

0.7

<0.01

<0.01

0.05

0.1

<0.01

<0.01

<0.01

160

HRP

15

0.6

<0.01

0.2

0.2

0.6

0.2

0.1

10

Opaque

OP-1

8

0.7

<0.01

0.2

0.6

0.3

0.07

0.06

160

OP-3

8

0.6

<0.01

0.2

0.08

0.1

0.07

0.04

160

OP-3HD

8

0.6

<0.01

0.2

0.08

0.1

0.07

0.04

160

Synthetic

Transparent

ES*1

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

1000

ED-C

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<1

ED-H

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<0.01

<100

(These are representative values and are not guaranteed.)


*1: The purity of ESL-1, ESL-2, ESL-1000, and ESL-2000 is the same as ES.

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Tosoh Corporation
Silica BU, Electronic Materials Department, High-Performance Materials Division

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